JPH01137060U - - Google Patents
Info
- Publication number
- JPH01137060U JPH01137060U JP3414888U JP3414888U JPH01137060U JP H01137060 U JPH01137060 U JP H01137060U JP 3414888 U JP3414888 U JP 3414888U JP 3414888 U JP3414888 U JP 3414888U JP H01137060 U JPH01137060 U JP H01137060U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- target
- outside
- vacuum chamber
- preliminary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000638 solvent extraction Methods 0.000 claims 1
- 238000009461 vacuum packaging Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3414888U JPH0546203Y2 (en]) | 1988-03-14 | 1988-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3414888U JPH0546203Y2 (en]) | 1988-03-14 | 1988-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01137060U true JPH01137060U (en]) | 1989-09-19 |
| JPH0546203Y2 JPH0546203Y2 (en]) | 1993-12-02 |
Family
ID=31260867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3414888U Expired - Lifetime JPH0546203Y2 (en]) | 1988-03-14 | 1988-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0546203Y2 (en]) |
-
1988
- 1988-03-14 JP JP3414888U patent/JPH0546203Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0546203Y2 (en]) | 1993-12-02 |
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